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inficon lds 2010 manualThis operating manual describes the installation and operation of the LDS3000 mass spectrometer module.The amount of helium or hydrogen occurring naturally in air creates a constant background signal.Danger due to implod- An external measuring chamber connected to an LDS3000 AQ is pumped off at ap- ing measuring chamber proximately 60 sccm. Within normal measurement times (2 - 30 seconds) no danger- ous negative pressure is generated. Pressure sensor PSG500 for measuring the pressure of the backing pump. Analog output 1 Leak rate mantissa Config. Analog output 2 Leak rate exponent Config.For reli- able measurements with the device, the helium content in the air must be less than 10 ppm. The ZERO function may be switched on only after that. Connection Turbo molecular pump rotation speed 1000 Hz 1500 Hz. If available, connect internal calibration leak 560-323 to the second free flange (FINE or ULTRA) of the vacuum connection. When using a sniffer valve: For the device to operate correctly upon opening of the sniffer valve, no additional line can be connected between the connection block and the sniffer valve or between the sniffer valve and the sniffer line. For reli- able measurements with the device, the helium content in the air must be less than 10 ppm. All dry vacuum pumps can be used with a gas flow of more than 60 sccm at a basic pressure of under 5 mbar. This manual describes how to use the dry INFICON backing pump (catalog number 560-630). Insert the 8 mm pin of the straight connector supplied with the INFICON backing pump (catalog number 560-630) into the adapter. Fig. 13: Straight connector, 8 to 10 mm Connect the 10 mm connector of the straight connector via a ID 10 mm hose to the dry backing pump. LDS3000 AQ devices can also be used if they are not operated in AQ mode.This does not apply to devices in AQ mode.http://copy2d.com/ftp/image/dell-optiplex-170l-pc-desktop-manual.xml

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Select operation mode LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803) Wait until the leak rate signal is optimally suited to the normal measurement se- quence of the plant.Therefore, it is usually not necessary to adjust the calibration factor manually. An incorrectly set calibration inevitably leads to wrong leak rate indicator! 7.8.7.1 Calibration factor sniffing. If the measurement system is operated in parallel to an additional pump system after an internal calibration though (following the partial flow principle), the measurement system will indicate a leak rate that is too low based on the partial flow ratio. ZERO is not possible. The trigger outputs switch depending on The output at the trigger outputs is: Leak the leak rate and the trigger threshold. In the factory setting the device uses cathode 1. The hydrogen percent- gen percentage age is taken into consideration with this specification. This will increase the displayed leak rate by the corresponding factor. Comment: The selection can also be made with the right sniffer key or assigned to one of the favorite keys of the control unit. Small (low flow) Remove the calibration leak from the chamber. Wait until the background signal is stable.For a stable leak rate signal, wait at least the duration of the set AQ measure- ment time. Start the background measurement. Within normal measurement times (2 - 30 seconds) no danger- ous negative pressure is generated. If you are measuring with forming gas, make sure that the device has been run- ning for at least half an hour. This time is needed to perform stable measure- ments. The lower value is always 0 (leak rate), which corresponds to 0 V output voltage. The exponent of the upper limit can be set in entire decades, such as 1 x 10. LDS2010 Analog Function LDS2010 Function Scaling of the Upper limit (10 setting. output. Error messages Errors are events that the device cannot correct itself and that force interruption of its operation.http://www.alcantaracosmetica.com/images/editor/dell-optiplex-210l-manual.xml You will find the settings and functions of the mass spectrometer module LDS3000 you can set us- ing the control unit in the operating instructions of the mass spectrometer module. Scaling of the Q(t)axis Linear or logarithmic Lin. The following table shows the authorizations of individual operator types. The memory in the control unit is limited to the recording of a 24-hour measurement.We recommend that you sign a service agreement with INFICON or one of INFICON's authorized service partners. 12.1 Maintenance at INFICON. Allow the turbo molecular pump to cool down if necessary. Remove turbo molecular pump.Do not fill in any more operating fluid. Use a face pin wrench to unscrew the cover.Put the mass spectrometer module into operation.The device consists of materials that can be recycled. This option should be exercised to prevent waste and also to protect the environment. You may have to register before you can post: click the register link above to proceed. To start viewing messages, select the forum that you want to visit from the selection below. Please check your inbox, and if you can’t find it, check your spam folder to make sure it didn't end up there. Please also check your spam folder. If you need a different version, please contact our sales staff. They have limited functional range and may not be supported in future. Please refere to appropriate documentation. Please contact your local INFICON representative. There is no differentiation between upper and lower case. A blank is required between the command and the parameter, no other blanks are allowed. Either the short or the extended command must be used, no other abbreviations are allowed (The short form is here written in capitals but the SW don’t difference upper and lower cases). Command Words have to be separated by a colon. A command can be composed of up to three words. Parameters have to be separated by a comma. If a comma is used during Otherwise the receive buffer may be overwritten.http://fscl.ru/content/bose-freespace-32se-manual The main functions of the leak detector are in plain text which points to the function. A list of the main functions is provided in Chapter 1.4.1.1. A list of all status query commands is given in Chapter 1.4.1.2. The LDS 3000 will then respond by outputting the current leak rate. All measurement quantities which may be queried are listed in Chapter 1.4.1.3. A list of these functions is given in Chapter 1.4.1.5. A received string which might be processed at that moment is erased and its processing is terminated. Thereafter, the interface is ready to receive. Through this character its is easily possible to check whether or not the data link has been properly installed. The status of the external calibration may be queried through S12. Sequence of commands for external calibration: There after, the LDS3000 will be in the STANDBY mode. To prevent automatic queries by computer programs, Linguee only allows a certain number of queries per computer. For users with disabled Javascript, this number is much lower than for those with enabled Javascript. The following steps may be helpful to prevent your computer from being blocked again: enable Javascript in your browser settings, wait for a few hours, and then try using Linguee again.https://dyodocs.com/images/camray-5-instruction-manual.pdf The characteristic movement of the thickness shear mode is for displacement to take place parallel to the major monitor crystal faces. In other words, the faces are displacement antinodes as shown in Figure 2-3. The responses located slightly higher in frequency are called anharmonics; they are a combination of the thickness shear and thickness twist modes. The response at about three times the frequency of the fundamental is called the third quasiharmonic. There are also a series of anharmonics slightly higher in frequency associated with the quasiharmonic. The first improvement was to use circular crystals. This increased symmetry greatly reduced the number of allowed vibrational modes. The second set of improvements was to contour one face of the crystal and to reduce the size of the exciting electrode. These improvements have the effect of trapping the acoustic energy. Reducing the electrode diameter limits the excitation to the central area. Contouring dissipates the energy of the traveling acoustic wave before it reaches the edge of the crystal. Energy is not reflected back to the center where it can interfere with other newly launched waves, essentially making a small crystal appear to behave as though it is infinite in extent. With the crystal’s vibrations restricted to the center, it is practical to clamp the outer edges of the Contouring also reduces the intensity of response of the generally unwanted anharmonic modes; hence, the potential for an oscillator to sustain an unwanted oscillation is substantially reduced. These micro-tears leave portions of the deposited film unattached and therefore unable to participate in the oscillation. These free portions are no longer detected and the wrong thickness consequently inferred. Since there is presently no way to separate the frequency change caused by added mass (which is negative) or even the frequency changes caused by temperature gradients across the crystal or film induced stresses, it is essential to minimize these temperature-induced changes. It is only in this way that small changes in mass can be measured accurately. Electronically the period measurement technique uses a second crystal oscillator, or reference oscillator, not affected by the deposition and usually much higher in frequency than the monitor crystal. This reference oscillator is used to generate small precision time intervals which are used to determine the oscillation period of the monitor crystal. This is done by using two pulse accumulators. The first is used to accumulate a fixed number of cycles, m, of the monitor crystal. The second is turned on at the same time and accumulates cycles from the reference oscillator until m counts are accumulated in the first.All of these require high time precision to resolve the small, mass induced frequency shifts between measurements. When the change of a monitor crystal’s frequency between measurements is small, that is, on the same order of size as the measurement precision, it is not possible to establish quality rate control. The uncertainty of the measurement injects more noise into the control loop, which can be counteracted only by longer time constants. Long time constants cause the correction of rate errors to be very slow, resulting in relatively long term deviations from the desired rate. These deviations may not be important for some simple films, but can cause unacceptable errors in the production of critical films such as optical filters or very thin layered superlattices grown at low rates. In many cases the desired properties of these films can be lost if the layer to layer reproducibility exceeds one, or two, percent. Ultimately, the practical stability and frequency of the reference oscillator limits the precision of measurement for conventional instrumentation. Advances in electronics taking place at the same time, namely the micro-processor, made it practical to solve the Z-match equation in “real-time”.To achieve this new level of accuracy requires only that the user enter an additional material parameter, Z, for the film being deposited. This equation has been tested This circuit actively keeps the crystal in resonance, so that any type of period or frequency measurement may be made. In this type of circuit, oscillation is sustained as long as the gain provided by the amplifiers is sufficient to offset losses in the crystal and circuit and the crystal can provide the required phase shift. The basic crystal oscillator’s stability is derived from the rapid change of phase for a small change in the crystal’s frequency near the series resonance point, as shown in Figure 2-5 on page 2-7. Longand short-term frequency stabilities are a property of crystal oscillators because very small frequency changes are needed to sustain the phase shift required for oscillation. Frequency stability is provided by the quartz crystal even though there are long term changes in electrical component values caused by temperature or aging or short-term noise-induced phase jitter. Figure 2-6 on page 2-8 is the same plot as Figure 2-5 overlaid with the response of a heavily loaded crystal. The crystal has lost the steep slope displayed in Figure 2-5. Because the phase slope is less steep, any noise in the oscillator circuit translates When this happens it is often more favorable for the oscillator to resonate at one of the anharmonic frequencies. This condition is sometimes short lived, with the oscillator switching between the fundamental and anharmonic modes, or it may continue to oscillate at the anharmonic. This condition is known as mode hopping and in addition to annoying rate noise can also lead to false termination of the film because of the apparent frequency change. It is important to note that the controller will frequently continue to operate under these conditions; in fact there is no way to tell this has happened except that the film’s thickness is suddenly apparently thinner by an amount equivalent to the frequency difference between the fundamental and the anharmonic that is sustaining the oscillation. This new system constantly tests the crystal’s response to an applied frequency in order to not only determine the resonant frequency, but also to verify that the crystal is oscillating in the desired mode. This new system is essentially immune to mode hopping and the resulting inaccuracies. It is fast and accurate, determining the crystal’s frequency to less than.005 Hz at a rate of 10 times per second. Because of the system’s ability to identify and then measure particular crystal modes, it is now possible to offer new features that take advantage of the additional informational content of these modes. This new “intelligent” At series resonance, this phase difference is exactly 0 degrees; that is, the crystal behaves like a pure resistance. By separating the applied voltage and the current returned from the crystal and monitoring the output of a phase comparator it is possible to establish whether the applied frequency is higher or lower than the crystal’s resonance point. At frequencies well below the fundamental, the crystal’s impedance is capacitive and at frequencies slightly higher than resonance it is inductive in nature. This information is useful if the resonance frequency of a crystal is unknown. A quick sweep of frequencies can be undertaken until the output of the phase comparator changes, marking the resonance event. For AT crystals we know that the lowest frequency event encountered is the fundamental. The events slightly higher in frequency are anharmonics. This information is useful not only for initialization, but also for the rare case when the instrument loses track of the fundamental. Once the frequency spectrum of the crystal is determined the instrument’s task is to follow the changing resonance frequency and to periodically provide a measurement of the frequency for subsequent conversion to thickness. The technique also allows the implementation of a sophisticated feature that cannot even be contemplated using the active oscillator approach. The same capability that allows the new technology to sweep and identify the fundamental can be used to identify other oscillation modes, such as the anharmonics and the quasiharmonic. Not only can the instrument track the This interrogation of multiple modes can be performed as fast as 10 Hz for two modes of the same crystal. There are several cases where accuracy has to be compromised because of incomplete or limited knowledge of the material constants of the deposited materials. Thin films are especially sensitive to process parameters, particularly in a sputtering environment. Consequently, the values available for bulk materials may not be pertinent. This is particularly true for multi-layer optical coatings and high-temperature superconductor fabrication. The effective Z-ratio of the composite of multi-material layers is not known. This false premise introduces error in the thickness and rate predictions. The magnitude of this error depends upon the film thickness and the amount of departure of the true Z-ratio from unity. He speculated there might be a relationship between the fundamental and one of the anharmonics similar to the relationship noted by Benes 8 between the fundamental and the third quasiharmonic. The frequencies of the fundamental and the anharmonics are very similar, solving the problem of capacitance of long cables. He found the ideas needed for establishing the required connections in papers published by Wilson 9 in 1974 and Tiersten and Smythe 10 in 1979. The three indices of the mode The three above mentioned modes are observed to have slightly different mass sensitivity and hence undergo slightly different frequency shifts. It is this difference that is used to estimate the Z-ratio of the material. Both of these elastic constants relate to shear motion. The essential element of Wajid’s theory is the following equation: This is hardly of any consequence however, because M is uniquely determined with the estimated Z and the measured frequency shift. Thus, thickness and rate of deposition are subsequently calculated from the knowledge of M. 11 Since the estimate for Z-ratio is dependent on the frequency shifts of the two modes, any spurious shift due to excessive mechanical or thermal stress on the crystal will lead to errors. This effect is most pronounced whenever there is a presence of gas in the environment, for example, in reactive evaporation or sputtering processes. In such cases, if the bulk Z-ratio is already well known, it is better to use the bulk value instead of the automatically determined Auto Z-ratio. In cases of co-deposition and sequential layers, automatic Z-ratio estimation is significantly superior. For a deposition process, this means keeping the deposition rate as close as possible to the desired rate. The purpose of a control loop is to take the information flow from the measurement system and to make power corrections that are appropriate to the characteristics of the particular evaporation source. When properly operating, the control system translates small errors in the controlled parameter, or rate, into the appropriate corrections in the manipulated parameter, power. The controller’s ability to quickly and accurately measure and then react appropriately to the small changes keeps the process from deviating very far from the set point. In the PID, P stands for proportional, I stands for integral and D stands for derivative action. Certain aspects of this model will be examined in detail a little further on. The responsiveness of an evaporation source can be found by repetitively observing the system response to a disturbance under a particular set of controller settings. After observing the response, improved controller parameters are estimated and then tried again until satisfactory control is obtained. Control, when it is finally optimized, essentially matches the parameters of the controller model to the characteristics of the evaporation source. It may take several hours to obtain satisfactory results. Often the parameters chosen for a specific rate will not be satisfactory for another. Ideally, it would be nice if a machine could optimize itself. In an operator initiated mode that is used during initial setup the instrument will measure the source characteristics. Slow sources are characterized by having significant dead time, whereas fast sources have no dead time. They fall into basically three categories: They are considered superior because of the ease with which the necessary experimental data can be obtained and because of the elimination (to a large extent) of trial and error when the technique is applied. After Auto-Control-Tune executes a step change of power, the resulting rate changes are smoothed and stored. The important response characteristics are determined as shown in Figure 2-7. The most common is to assume that the dynamic characteristics of the process can be represented by a first-order lag plus a dead time. The Laplace transform for this model (conversion to the s domain) is approximated as: They are the steady state gain, K p, the dead time, L, and the time constant, T 1. Several methods have been proposed to extract the required parameters from the system response as graphed in Figure 2-7. These are: a one point fit at 63.2 of the transition (one time constant); a two point exponential fit; and a weighted least-square-exponential fit. From the above information a process is sufficiently characterized so that a controller algorithm may be customized. The process block implicitly includes the dynamics of the measuring devices and the final control elements, in our case the evaporator power supply. The feedback mechanism is the error generated by the difference between the measured deposition rate, C(s), and the rate set point, R(s). Optimum control is a somewhat subjective quantity as noted by the presence of several mathematical definitions as shown below. Consequently, using ISE as a criterion of performance will result in responses with small overshoots but long settling times, since small errors occurring late in time contribute little to the integral. Disclaimer The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product. Equipment Description: IC6 Deposition Controller (including all options).For the purposes of this manual they are defined as follows: NOTE: Pertinent information that is useful in achieving maximum IC6 efficiency when followed. CAUTION Failure to heed these messages could result in damage to the IC6. There are no user-serviceable components within the IC6 case.Extension cables must always have three conductors including a protective earth terminal. Never remove the covers from the IC6 during normal operation. You must obtain a Return Material Authorization (RMA) number from the Customer Support Representative. Partitioning.None Initialization. It is not necessary to have sensors, source controls, inputs or relays connected to do this. For more complete installation information, refer to. Confirm that the back panel (main) AC switch is in the ON position. A green pilot light should be seen next to the power switch. General guidelines for each sensor type produced by INFICON are outlined in the Sensor Data Sheets on www.inficon.com website. It may be also used on a table. The IC6 is forced-air cooled, with the air flow exiting the rear of the IC6 for clean room convenience. Connect a ring terminal to the ground strap, thus allowing a good connection and easy removal and installation. This connection must be made at installation. The likelihood of these wires causing a problem can be greatly diminished by adhering to the following guidelines. It can respond to external instructions through its 14 isolated input lines. It can be used to remotely control or monitor the IC6. An industry standard 9-pin D-Sub connector is required for the host computer side connection. Depending on the computer source, all connections may not be necessary. The MENU key is used to navigate through the IC6 displays. The keys auto-repeat; the cursor will continue to move as long as the key is held down. Outputs are programmable for recorder function. 13 Fan Outlet Exhaust opening for the IC6’s miniature fan; Do not block! 14 24-Volt Supply (standard) Provides three 24 V (dc) supplies rated at 1.75 Amps. See Table 2-5 on page 2-12. The six main types of displays are: Operate, Sensor, Source, Material, Process, and General. To move from one display to another, use the cursor and MENU keys. Status messages are displayed as long as a status is true. They are put up and taken down as the condition that set them changes. Text will only be shown for installed cards, unless you are in TEST. This quantity is useful as an indicator of when to change the monitor crystal to safeguard against crystal failures during deposition. Failed crystal numbers are shown in the Failed column under Crystal. The IC6 determines to use Matl or Sens depending on the frequency of the fundamental resonance. If the fundamental frequency closely matches the last valid fundamental frequency prior to Auto-Z failure, the IC6 will use the Sens value. The values range from a maximum of 800 (healthiest) to a minimum of 0 (least healthy). The Activity value is useful for predicting when a crystal needs to be replaced. Figure 3-11 Source overview display Once the right cursor key has been used to move to one of the six sources, the Select Source function key will appear. Chapter 5, Material Set-Up for programming details and screen displays. 3.3.6.1 Overview Page The Material Overview display, see Figure 3-12, shows all 32 available materials. If Multipoint is set to No, a Backup Sensor and its Tooling factor can be specified. Other choices will be shown according to the Sensor Type. If the sensor is a XtalTwo, the Tooling factor for the secondary crystal can be specified. In the case of a multi-position rotary sensor head, the range of crystal positions to use can be specified. Cursor to a Material formula, then press F1 Define Material to select that material.A 15 character name can be entered here by cursoring to the Name and using the keys in cell phone style to enter characters and numbers. See section 7.3, DACs Page Parameters, on page 7-3. 3.3.8.3 Comm Page Datalogging of crystal data is enabled here and RS232 and optional Ethernet parameters are entered. Logic statements are evaluated sequentially, 10 times per second, while the IC6 is powered up. Chapter 9, Logic Statement Set-Up for programming details. 3.3.11 Maintenance The Maintenance display is organized into four subscreens: Auto Tune, Cross Talk, Source Maint(enance)and Sys(tem) Status. Up to six layers can be started and rate controlled at the same time. Two sequential layers can be linked as being co-deposited, enabling crosstalk correction and ratio control. Configuring the sensors involves designating whether the sensor is a single or multi-position sensor, and what output relays are connected to the sensor shutter and crystal switcher, if any. Also, the Auto-Z feature is activated or deactivated during sensor configuration. A Layer is not being executed when the IC6 is the READY, STOP, SUSPEND or IDLE state. If not, press STOP then RESET. Press START. Assuming there are no configuration problems, the layer to start will enter pre-deposition, and continue on through deposition and post-deposition. Assuming the error has been remedied, the process can be continued where it left off by pressing START. Pressing RESET will abandon the run. 3.4.3 Pre-conditioning a Layer It may be desirable to prepare a layer for deposition while the previous layer is in progress. Alternatively, two or three instances of co-deposition are also possible by pressing START two or three times, respectively. Inactive Inactive 2. CRUCIBLE SWITCH During this state, the crucible turret is Inactive Inactive (Crucible Sw) being moved from its current position to the one called out for the given material. NOTE: In STOP or SUSPEND, the IC6 will accept a START provided a valid crystal is available for the layer(s) being started. 3.6 Special Features The IC6 has several special features to enhance the performance of the instrument. The Failed Crystal list can be cleared while in Deposit by pressing the F4 function key on the Sensor Information screen with the cursor positioned on the appropriate sensor number. The Rotate Head function is permitted only if the IC6 is in Ready, Stop or all active layers are in Idle or Suspend. This results in an “unable to Auto-Z” condition because the initial frequencies of the uncoated monitor crystal are not known. The Handheld Controller is attached to the IC6 with a modular plug to the front panel. In Time Compressed mode, all layer times are sped up so that a long process can be simulated in one tenth of the time.